Chemische Dampfablagerung : CVD-Grundlagen für die Mikroelektronik / Heinrich Arnold.
Material type:
TextLanguage: German Publication details: Berlin : Akademie-Verlag, 1982.Description: x, 158 p. : 26 ill. ; 22 cmSubject(s): DDC classification: - 671.7/35 19
- TS695 .A75 1982
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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წიგნი
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ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ. | 544 (Browse shelf(Opens below)) | 2E37757 | Available | 2011-1545 |
Includes bibliographical references and index.
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