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_aTA404.2 _b.M53 1998 |
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_aMicroelectromechanical structures for materials research : _bsymposium held April 15-16, 1998 , San Francisco, California, U.S.A. / _ceditors, Stuart Brown ... [et al.]. |
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_aWarrendale, Pa. : _bMaterials Research Society, _cc1998. |
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| 300 |
_axi, 248 p. : _bill. ; _c24 cm. |
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| 490 | 1 | _a(Materials Research Society symposium proceedings ; v. 518) | |
| 504 | _aIncludes bibliographical references and index. | ||
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_aMaterials _xResearch _xEquipment and supplies _xCongresses. _98483 |
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_aMicroelectromechanical systems _xCongresses. _98484 |
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_aBrown, Stuart B. _98485 |
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