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_aDLC _cDLC _dDLC |
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_aMaterials, technology, and reliability for advanced interconnects and low-k dielectrics : _bsymposium held April 23-27, 2000, San Francisco, California, U.S.A / _ceditors, G.S. Oehrlein ... [et al.]. |
| 260 |
_aWarrendale, Pa. : _bMaterials Research Society, _cc2001. |
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| 300 |
_a1 v. (various pagings) : _bill. ; _c24 cm. |
||
| 490 | 1 |
_a(Materials Research Society symposium proceedings ; _vv. 612) |
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| 504 | _aIncludes bibliographical references and indexes. | ||
| 650 | 0 |
_aSemiconductors _xMaterials _vCongresses. _98864 |
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| 650 | 0 |
_aSemiconductors _xJunctions _vCongresses. _98865 |
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| 650 | 0 |
_aDielectric films _vCongresses. _98866 |
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| 650 | 0 |
_aIntegrated circuits _xMaterials _vCongresses. _98867 |
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| 650 | 0 |
_aIntegrated circuits _xReliability _vCongresses. _98868 |
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| 700 | 1 |
_aOehrlein, G. S. _98869 |
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| 830 | 0 |
_aMaterials Research Society symposia proceedings ; _vv. 612. _98870 |
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| 906 |
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