| 000 | 01285cas a22003135a 4500 | ||
|---|---|---|---|
| 001 | ebs576775 | ||
| 003 | EbpS | ||
| 006 | m d |||||| | ||
| 007 | cr anunnnuuuaa | ||
| 008 | 931011c19929999okuqr1p 0 a0eng d | ||
| 022 | 0 | _a1074-407X | |
| 035 | _a(EbpS)ebs576775 | ||
| 050 | 0 | 0 |
_aTK7871.85 _b.M519 |
| 245 | 0 | 0 |
_aMicrolithography world _h[electronic resource]. |
| 260 |
_aPort Washington, N.Y. : _bPenn Well Publication, published in cooperation with SPIE, _c[1992- |
||
| 310 |
_aQuarterly, _bJan./Feb./Mar. 1993- |
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| 362 | 0 | _aVol. 1, no. 1 (Mar./Apr. 1992)- | |
| 500 | _aTitle from cover. | ||
| 500 | _aPublished: Tulsa, OK, Oct., Nov., Dec. 1993- | ||
| 500 | _aLatest issue consulted: Vol. 4, no. 2 (spring 1995). | ||
| 500 | _aTrade Publication | ||
| 530 | _aOnline version of print publication. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vPeriodicals. |
|
| 650 | 0 |
_aMicrolithography _vPeriodicals. |
|
| 650 | 0 |
_aMasks (Electronics) _vPeriodicals. |
|
| 710 | 2 | _aSociety of Photo-optical Instrumentation Engineers. | |
| 773 | 0 |
_tAcademic Search Premier _dIpswich, MA : EBSCO Publishing, 1999- |
|
| 856 | 4 | 0 |
_3Full text available 5/1/2003 - 11/1/2008. _zAvailable on EBSCOhost. _uhttp://search.ebscohost.com/direct.asp?db=aph&jid=%229CK%22&scope=site |
| 999 |
_c38954 _d38954 |
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