000			01750nam a22003857a 4500
001			2405742
003			Ge_NSL
005			20240912155820.0
008			160318s1986 de ||||| |||| 00| 0 eng d
010			_a 86017731
020			_a0387168982 (U.S.)
040			_aDLC _cDLC _dDLC
041			_aeng
050	0	0	_aTK7871.85 _b.P47 1986
080			_a53
082	0	0	_a621.3815/2 _219
245	0	4	_aThe Physics and fabrication of microstructures and microdevices : _bproceedings of the winter school, Les Houches, France, March 25-April 5, 1986 / _ceditors M. J. Kelly and C. Weisbuch.
260			_aBerlin ; _aNew York : _bSpringer-Verlag, _cc1986.
300			_axi, 469 p. : _bill. ; _c25 cm.
440		0	_aSpringer proceedings in physics ; _vv. 13 _9235641
500			_aProceedings of the Winter School on "the Physics and Fabrication of Microstructures."
504			_aIncludes bibliographies and index.
650		0	_aSemiconductors _xCongresses.
650		0	_aIntegrated circuits _xVery large scale integration _xDesign and construction _xCongresses. _9301975
650		0	_aSemiconductors _xDesign and construction _xCongresses. _9301976
653			_aფიზიკა
653			_aნახევარგამტარები
653			_aდიზაინი და კონსტრუქცია
653			_aკონგრესები
700	1		_aWeisbuch, C. _q(Claude), _d1945- _cრედაქტორი _9301977
700	1		_aKelly, M. J. _q(Michael J.), _d1949- _cრედაქტორი _9301978
711	2		_aWinter School on "the Physics and Fabrication of Microstructures" _d(1986 : _cLes Houches, Haute-Savoie, France) _9301979
906			_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg
942			_2udc _cBK
999			_c49101 _d49101