000 00872nam a2200253 4500
999 _c510096
_d510094
003 Ge_NSL
005 20191119155721.0
008 191119s1992 se ||||| |||| 00| 0 eng d
020 _a9789155430184
020 _a9789155430184
041 _aeng
080 _a536.3 : 54
100 _aEngqvist, Jan
_9137949
245 _aThermodynamic and experimental CVD studies of TiSi₂ and W /
_cJan Engqvist.
264 _aUppsala :
_b Acta Universitatis Upsaliensis,
_c1992.
300 _a31 p. :
_bfig.
490 _aComprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ;
_v413
500 _aDissertation: doctoral Uppsala University 1992.
504 _aIncludes bibliographical references.
653 _aფიზიკა
653 _aთერმოდინამიკა
653 _aქიმია
942 _2udc
_cBK