| 000 | 00853nam a22002297a 4500 | ||
|---|---|---|---|
| 999 |
_c5147 _d5147 |
||
| 001 | HUBBV024972423 | ||
| 003 | Ge_NSL | ||
| 005 | 20201228144030.0 | ||
| 008 | 111207s1997 se ||||| |||| 00| 0 eng d | ||
| 041 | _aeng | ||
| 080 | _a544 | ||
| 100 |
_aSmith L. _913401 |
||
| 245 | 0 | 0 |
_aSilicion Microstructures Fabrication Techniques and Applications / _cL. Smith ; Uppsala Universitet, Teknisk-Naturvetenskapliga Fakulteten. |
| 260 |
_aUppsala : _bUniv., _c1997. |
||
| 300 | _a36 p. | ||
| 490 |
_9185261 _aActa Universitatis Upsaliensis. Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology |
||
| 653 | _aქიმია | ||
| 653 | _aფიზიკური ქიმია | ||
| 710 |
_913816 _aUppsala Universitet _bTeknisk-Naturvetenskapliga Fakulteten |
||
| 900 | _b11;BV024972423 | ||
| 942 |
_2udc _cBK |
||