000 02224nam a22003498i 4500
001 CR9780511984662
003 UkCbUP
005 20200124160250.0
006 m|||||o||d||||||||
007 cr||||||||||||
008 101130s2011||||enk o ||1 0|eng|d
020 _a9780511984662 (ebook)
020 _z9780521889254 (hardback)
020 _z9781107645790 (paperback)
040 _aUkCbUP
_beng
_erda
_cUkCbUP
050 0 0 _aTK7875
_b.K83 2011
082 0 0 _a621.381
_222
100 1 _aKubby, Joel A.,
_eauthor.
245 1 2 _aA guide to hands-on MEMS design and prototyping /
_cJoel Kubby.
246 3 _aA Guide to Hands-on MEMS Design & Prototyping
264 1 _aCambridge :
_bCambridge University Press,
_c2011.
300 _a1 online resource (xi, 166 pages) :
_bdigital, PDF file(s).
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
500 _aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
505 8 _aMachine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics.
520 _aWhether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
650 0 _aMicroelectromechanical systems.
776 0 8 _iPrint version:
_z9780521889254
856 4 0 _uhttps://doi.org/10.1017/CBO9780511984662
999 _c519414
_d519412