| 000 | 00346nam a22000977a 4500 | ||
|---|---|---|---|
| 008 | 220328s1988 se ||||| |||| 00| 0 eng d | ||
| 080 | _a621.38 | ||
| 100 |
_aGustafsson, kari _9229885 |
||
| 245 |
_aSilicon micromechanics with applications in optical scanning and sensing systems / _cKari Gustafsson. |
||
| 264 |
_aUppsala : _bUppsala University, _c1988. |
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| 999 |
_c577283 _d577281 |
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