| 000 | 00813nam a22002297a 4500 | ||
|---|---|---|---|
| 003 | Ge_NSL | ||
| 005 | 20160905160845.0 | ||
| 008 | 160905d19789999us ||||| |||| 00| 0 eng d | ||
| 022 | _a0022-5355 | ||
| 041 | _aeng | ||
| 080 | _a533.5(05) | ||
| 245 |
_aJournal of vacuum science and technology : _b1978 / _cAmerican Institute of Physics. American Vacuum Society. |
||
| 264 |
_a[New York, N.Y.] : _bPublished for the American Vacuum Society by the American Institute of Physics, _c [1964-1982]. |
||
| 300 | _av. | ||
| 500 | _aTitle varies slightly. Title from cover. | ||
| 653 | _aფიზიკა | ||
| 653 | _aვაკუუმის ფიზიკა | ||
| 653 | _aპერიოდიკა | ||
| 710 | _aAmerican Institute of Physics. | ||
| 710 | _aAmerican Vacuum Society. | ||
| 942 |
_2udc _cCR |
||
| 999 |
_c77092 _d77092 |
||