| 000 | 00814nam a22002297a 4500 | ||
|---|---|---|---|
| 003 | Ge_NSL | ||
| 005 | 20160906110337.0 | ||
| 008 | 160906u19839999us ||||| |||| 00| 0 eng d | ||
| 022 | _a0734-2101 | ||
| 041 | _aeng | ||
| 080 | _a533.5(05) | ||
| 245 |
_aJournal of vacuum science & technology : _bA : 1983 : an official journal of the American Vacuum Society / _cAmerican Vacuum Society ; American Institute of Physics. |
||
| 264 |
_aNew York : _b Published for the Society by the American Institute of Physics, _c1983- |
||
| 300 | _av. | ||
| 500 | _aTitle from cover. | ||
| 653 | _aფიზიკა | ||
| 653 | _aვაკუუმის ფიზიკა | ||
| 653 | _aპერიოდიკა | ||
| 710 | _aAmerican Vacuum Society. | ||
| 710 | _aAmerican Institute of Physics. | ||
| 942 |
_2udc _cCR |
||
| 999 |
_c77137 _d77137 |
||