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Silicon front-end technology--materials processing and modelling / editors, Nicholas E.B. Cowern ... [et al.].

Contributor(s): Cowern, Nicholas E. B.
Material type: TextTextSeries: Materials Research Socisty symposia: v. 532.Publisher: Warrendale, Pa. : Materials Research Society, c1998Description: xi, 228 p. : ill. (some col.) ; 24 cm.ISBN: 1558994386.Subject(s): Semiconductors -- Design and construction -- Congresses | Semiconductor doping -- Congresses | Semiconductors -- Defects -- CongressesDDC classification: 621.3815/2 LOC classification: TK7871.85 | .S5464 1998
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წიგნი წიგნი ეროვნული სამეცნიერო ბიბლიოთეკა 1
საცავი. 1 კორპ.
678.8 (Browse shelf) 2E60192 Available 2010-611165

Proceedings of a symposium held April 13-15, 1998 in San Francisco, California.

Includes bibliographical references and index.

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