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Silicon front-end technology--materials processing and modelling / editors, Nicholas E.B. Cowern ... [et al.].

Contributor(s): Material type: TextTextSeries: Materials Research Socisty symposia ; v. 532.Publication details: Warrendale, Pa. : Materials Research Society, c1998.Description: xi, 228 p. : ill. (some col.) ; 24 cmISBN:
  • 1558994386
Subject(s): DDC classification:
  • 621.3815/2 21
LOC classification:
  • TK7871.85 .S5464 1998
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Item type Current library Call number Copy number Status Date due Barcode
წიგნი წიგნი ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ. 678.8 (Browse shelf(Opens below)) 2E60192 Available 2010-611165

Proceedings of a symposium held April 13-15, 1998 in San Francisco, California.

Includes bibliographical references and index.

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