Silicon front-end technology--materials processing and modelling / editors, Nicholas E.B. Cowern ... [et al.].

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Material type: Text

TextSeries: Materials Research Socisty symposia ; v. 532.Publication details: Warrendale, Pa. : Materials Research Society, c1998.Description: xi, 228 p. : ill. (some col.) ; 24 cmISBN:

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Item type	Current library	Call number	Copy number	Status	Date due	Barcode
წიგნი	ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ.	678.8 (Browse shelf(Opens below))	2E60192	Available		2010-611165

Proceedings of a symposium held April 13-15, 1998 in San Francisco, California.

Includes bibliographical references and index.

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