Silicon front-end technology--materials processing and modelling / editors, Nicholas E.B. Cowern ... [et al.].
Contributor(s): Cowern, Nicholas E. B
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Material type: 
TextSeries: Materials Research Socisty symposia: v. 532.Publisher: Warrendale, Pa. : Materials Research Society, c1998Description: xi, 228 p. : ill. (some col.) ; 24 cm.ISBN: 1558994386.Subject(s): Semiconductors -- Design and construction -- Congresses | Semiconductor doping -- Congresses | Semiconductors -- Defects -- CongressesDDC classification: 621.3815/2 LOC classification: TK7871.85 | .S5464 1998
| Item type | Current location | Call number | Copy number | Status | Date due | Barcode |
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წიგნი
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ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ. | 678.8 (Browse shelf) | 2E60192 | Available | 2010-611165 |
Proceedings of a symposium held April 13-15, 1998 in San Francisco, California.
Includes bibliographical references and index.
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