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Chemische Dampfablagerung : CVD-Grundlagen für die Mikroelektronik / Heinrich Arnold.

By: Material type: TextTextLanguage: German Publication details: Berlin : Akademie-Verlag, 1982.Description: x, 158 p. : 26 ill. ; 22 cmSubject(s): DDC classification:
  • 671.7/35 19
LOC classification:
  • TS695 .A75 1982
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Item type Current library Call number Copy number Status Date due Barcode
წიგნი წიგნი ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ. 544 (Browse shelf(Opens below)) 2E37757 Available 2011-1545

Includes bibliographical references and index.

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