Microlithography world (Record no. 38954)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01285cas a22003135a 4500 |
| 001 - CONTROL NUMBER | |
| control field | ebs576775 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | EbpS |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION | |
| fixed length control field | m d |||||| |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr anunnnuuuaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 931011c19929999okuqr1p 0 a0eng d |
| 022 0# - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1074-407X |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (EbpS)ebs576775 |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | .M519 |
| 245 00 - TITLE STATEMENT | |
| Title | Microlithography world |
| Medium | [electronic resource]. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Port Washington, N.Y. : |
| Name of publisher, distributor, etc | Penn Well Publication, published in cooperation with SPIE, |
| Date of publication, distribution, etc | [1992- |
| 310 ## - CURRENT PUBLICATION FREQUENCY | |
| Current publication frequency | Quarterly, |
| Date of current publication frequency | Jan./Feb./Mar. 1993- |
| 362 0# - DATES OF PUBLICATION AND/OR SEQUENTIAL DESIGNATION | |
| Dates of publication and/or sequential designation | Vol. 1, no. 1 (Mar./Apr. 1992)- |
| 500 ## - GENERAL NOTE | |
| General note | Title from cover. |
| 500 ## - GENERAL NOTE | |
| General note | Published: Tulsa, OK, Oct., Nov., Dec. 1993- |
| 500 ## - GENERAL NOTE | |
| General note | Latest issue consulted: Vol. 4, no. 2 (spring 1995). |
| 500 ## - GENERAL NOTE | |
| General note | Trade Publication |
| 530 ## - ADDITIONAL PHYSICAL FORM AVAILABLE NOTE | |
| Additional physical form available note | Online version of print publication. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors |
| General subdivision | Design and construction |
| Form subdivision | Periodicals. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microlithography |
| Form subdivision | Periodicals. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Masks (Electronics) |
| Form subdivision | Periodicals. |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Society of Photo-optical Instrumentation Engineers. |
| 773 0# - HOST ITEM ENTRY | |
| Title | Academic Search Premier |
| Place, publisher, and date of publication | Ipswich, MA : EBSCO Publishing, 1999- |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Full text available 5/1/2003 - 11/1/2008. |
| Public note | Available on EBSCOhost. |
| Uniform Resource Identifier | <a href="http://search.ebscohost.com/direct.asp?db=aph&jid=%229CK%22&scope=site">http://search.ebscohost.com/direct.asp?db=aph&jid=%229CK%22&scope=site</a> |
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