National Science Library of Georgia

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Microlithography world [electronic resource].

Contributor(s): Material type: Continuing resourceContinuing resourcePublication details: Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, [1992-ISSN:
  • 1074-407X
Subject(s): LOC classification:
  • TK7871.85 .M519
Online resources: Available additional physical forms:
  • Online version of print publication.
 In: Academic Search Premier
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Title from cover.

Published: Tulsa, OK, Oct., Nov., Dec. 1993-

Latest issue consulted: Vol. 4, no. 2 (spring 1995).

Trade Publication

Online version of print publication.

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