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Materials, technology, and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A / editors, G.S. Oehrlein ... [et al.].

Contributor(s): Material type: TextTextSeries: Materials Research Society symposia proceedings ; v. 612.Publication details: Warrendale, Pa. : Materials Research Society, c2001.Description: 1 v. (various pagings) : ill. ; 24 cmISBN:
  • 155899520X
Subject(s):
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