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CVD and ALD of group IV- and V-oxides for dielectric applications / Katarina Forsgren.

By: Material type: TextTextLanguage: English Series: Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 665 | Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology. Uppsala universitet ; 665Publisher: Uppsala : Acta Universitatis Upsaliensis, 2001Description: viii, 55 pISBN:
  • 9155451438
Subject(s): Genre/Form: Other classification:
  • 33.77
Dissertation note: Zugl.: Uppsala, Univ., Diss., 2001.
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Item type Current library Call number Copy number Status Date due Barcode
წიგნი წიგნი ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ. 546 (Browse shelf(Opens below)) 2E50778 შესამოწმებელია 2020-8920

Zugl.: Uppsala, Univ., Diss., 2001.

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