CVD and ALD of group IV- and V-oxides for dielectric applications / Katarina Forsgren.
Material type: TextLanguage: English Series: Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 665 | Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology. Uppsala universitet ; 665Publisher: Uppsala : Acta Universitatis Upsaliensis, 2001Description: viii, 55 pISBN:- 9155451438
- 33.77
Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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წიგნი | ეროვნული სამეცნიერო ბიბლიოთეკა 1 საცავი. 1 კორპ. | 546 (Browse shelf(Opens below)) | 2E50778 | შესამოწმებელია | 2020-8920 |
Zugl.: Uppsala, Univ., Diss., 2001.
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